Abstract:Micro-hollow cathode discharge is one kind of typical non-equilibrium high pressure micro-discharges.It can produce a dense plasma under a low voltage,which leads to an enormous research potential.In this paper,main simulation models are analyzed and compared,inculding Monte-Carlo model,fluid model,kinetic model (represented by particle-in-cell/Monte-Carlo model),mixed model and equivalent circuit model.The models can be used to explore the development of a discharge system.Micro-hollow cathode discharges should go through three different phases including abnormal glow discharge,self-pulsing and normal glow discharge,and finally reach a steady state.In particular,the self-pulsing phase in which the plasma density reaches a peak value is the current research focus.
