Abstract:SiO2 nano-flowers were prepared by radio frequency sputtering technique and chemical vapor deposition (CVD). The prepared nanocomposites were characterized by scanning electron microscopy (SEM), X ray diffraction (XRD), and Fourier transform infrared spectroscopy (FTIR). And also the luminescent behavior of the nanocomposite films was characterized by photoluminescence (PL). An intensively emission peak at around 394nm was observed with the excitation wavelength at 325nm.