PSD位移传感器测量误差的修正方法

Correction for Measurement Error of Displacement Sensor Based on PSD

摘要:

为了提高自制位置敏感探测器（PSD）激光三角位移传感器的精度，提出一种简单、可行的数据修正方法，对传感器所采用的测量原理、敏感器件及自制工艺等进行了研究。首先，对自制的位移传感器的静态精度进行实验标定，分析其位移误差曲线。通过将位移测量误差曲线与敏感器件自身检出误差曲线进行比对，结合自制传感器的组装工艺，分析其误差来源。然后，通过调整激光三角测量原理中位移传递公式的具体参数，达到优化自制位移传感器的静态精度的目的。最后，用反复多次地，不同测量范围、测量步长下的位移数据曲线优化效果，证明这种修正方法的普适性。实验结果证明：经过该方法修正后，自制的PSD位移传感器的测量数据的误差降低约80%，其静态位移精度基本达到1%。这种修正方法能够简单、有效地提高PSD激光三角位移传感器的测量精度。

Abstract:

In order to improve the accuracy of the self made displacement sensor based on PSD and laser triangulation, a simple and feasible data correcting method was proposed. The measuring principles, sensitive devices and self made craft adopted by the sensor were studied. Firstly, experimental calibrations on the static accuracy were carried out. The displacement error curve of the sensor was analyzed. By comparing the displacement error curve with the detected error curve of the sensitive devices, considering the assembly process of the self made sensor, the error sources were analyzed. Then, by adjusting the specific parameters of the displacement pass formula of laser triangulation, the purpose of optimizing the static accuracy of the self made displacement sensor was achieved. Finally, the universality of this correction method was proved by the optimization results of the displacement curves obtained under different ranges and steps. Experimental results show that, after the correction, the measuring error of the self made displacement sensor is reduced by about 80% and its static precision reaches approximately 1%.