非晶硅薄膜光谱响应研究

Research on Spectral Response of Amorphous Silicon Thin Films

摘要:

利用Matlab软件计算了基于本征吸收的非晶硅薄膜的光谱响应，仿真出由多个不同带隙的薄膜组成的非晶硅薄膜的光谱响应，仿真了薄膜厚度、光学禁带宽度参数对非晶硅薄膜光谱响应的影响，设计出一种渐变带隙的非晶硅薄膜。结果表明渐变带隙的非晶硅薄膜能有效拓宽薄膜的光谱响应范围，也能提高光谱中对各个波长的响应值。

Abstract:

Using Matlab software to calculate the spectral response of amorphous silicon thin film based on the intrinsic absorption, simulations were carried out on the spectral response of the films composed by a number of amorphous silicon thin films with different band gaps. And an amorphous silicon film with gradient bandgap was designed. Simulation results indicate that the designed silicon thin film can not only effectively broaden the spectral response range, but also improve the response value on the respective wavelengths.