Abstract:The ZnO nanorod arrays were prepared by hydrothermal method with the seed layers annealed at different annealing temperatures as the substrate. Effects of annealing temperature of seed layer on phase structure, microtopography and luminescence property of the ZnO nanorod arrays were investigated. ZnO nanorod array with the seed layer annealed at 450℃ shows better spatial orientation and luminescence property. Additionally, the mechanisms concerning the dependence of the properties on annealing temperature of the seed layer were discussed.