方形孔径微透镜阵列与红外焦平面集成技术研究

Study on Integration of Square Aperture Spherical Micro lens Arrays and Infrared Focal Plane

摘要:

针对红外焦平面阵列自身存在的占空比小、光能利用率低的问题，提出利用光胶技术将方形孔径球面微透镜阵列与红外焦平面集成。从理论角度分析了微透镜阵列集成的聚能效应。设计“栅线”和“十字”双对准标记，采用衍射光栅同轴对准方法实现器件的对准。经过对集成前后红外焦平面性能进行对比，发现响应率提高了近40%，探测率提高了约20%，红外焦平面的噪声从758.89μV下降到668.23μV。最终得到结论：光胶法用于两种器件的集成具有耐温性好、变形小、强度高等优点，集成后红外焦平面的探测性能显著提高，有利于探测器微小型化发展。

Abstract:

According to the problems of small duty cycle and low light energy utilization of infrared focal plane, the optical cement technology, which integrates square aperture spherical micro lens arrays with infrared focal plane (IRFPA), was put forward. The cumulative effect of micro lens arrays was analyzed theoretically. The "grating line" and "cross" double alignment marks were designed. The alignment was realized by diffraction grating coaxial alignment method. Comparisons of before and after integration indicate that the responsivity and the detectivity are improved by 40% and 20%, respectively, while the noise is decreased form 758.89μV to 668.23μV. It can be concluded that the proposed method owns the features of high temperature resistance, small deformation and high intensity, and the detection performance of the IRFPA is improved significantly after integration, which is helpful for the detectors microminiaturization development.