Abstract:Porous silicon (PS) for 2D photonic crystal was prepared by electrochemical method under different voltage strengths and electrolyte concentrations, and then its microstructure was observed by scanning electron microscope. Studies show that the stable space charge region under constant-voltage condition is more beneficial for the fabrication of 2D photonic crystals. The pore diameter and pore depth have an increasing trend with the increasing erosion voltage intensity and the growth rate is gradually decreased, as well as the growth rate of efficiency ratio of corrosion. With the decrease of concentration of etching solution, the corrosion rate decreases, but the efficiency ratio of corrosion increases. Although the growth rate of PS decreases, but the growth quality is better.
