用于声光移频的声表面波谐振器

Surface Acoustic Wave Resonator for Acousto-optic Frequency Shifter

摘要:

针对一种喇曼型声表面波声光器件的设计需求，设计制作出一种能够满足喇曼-奈斯衍射要求的、低损耗、高Q值声表面波谐振器。利用耦合模(COM)理论仿真谐振器的性能，建立谐振器的COM模型，求解COM方程，提取出COM参数。利用COM软件仿真设计谐振器的结构参数，设计的谐振器中心频率为78.028MHz，Q值为10428，插入损耗为-6.153dB。利用微加工技术加工制作出声表面波谐振器，用矢量网络分析仪对其性能进行测试，得到谐振器实际中心频率为78.34MHz，插入损耗为-11.273dB，Q值为6465.7，该谐振器能够满足喇曼型声表面波声光器件的应用需求。

Abstract:

According to requirements of a Raman-type acousto-optic device driven by surface acoustic wave (SAW), a SAW resonator with low loss and large Q value was designed and fabricated, which can meet the requirement of Raman-Nath diffraction. The performance of the resonator was simulated by establishing COM (coupling-of-model) model, solving COM equation and extracting COM parameters. The design parameters of the resonator were simulated by COM software, and it is show that the theoretical center frequency, Q value and insertion loss of the designed resonator are 78.028MHz, 10428 and -6.153dB, respectively. Then the resonator was fabricated with micromachining technology and its performance was tested with vector network analyzer. Such results are obtained as: the actual center frequency of 78.34MHz, insertion loss of -11.273dB, Q value of 6465.7.