Abstract:Simulated is the light extraction efficiency of GaN based LEDs fabricated on hexagonal pyramid shaped patterned sapphire substrate (PSS) with different rotation angles. It is revealed that as the rotation angle of hexagonal pyramids changes, the luminous flux from all six facets of LED chips changes in different trends. When the rotation angle rises from 0° to 30°, the top and total luminous flux decreases, but the bottom luminous flux increases inversely. Further, both the top and total luminous fluxes reach the maximum when the rotation angle is at the range of 0~6°. Combining the optical performance with the processing technique, it is safe to conclude that the hexagonal pyramid shaped PSS LEDs with rotation angle of 0~6° have the highest light extraction efficiency.