Abstract:With high transparency, adjustable band gap and good match with CIGS in lattice and energy band structure, Zn1-xMgxO is regarded as the suitable material for the buffer layer and window layer of CIGS solar cells, so the fabrication of high qualityZn1-xMgxO films becomes to be the key problem for improving the efficiency of CIGS solar cells. In this paper, the preparation methods and structural and optical characteristics of Zn1-xMgxOfilms are introduced; and also the effects of concentration of Mg, the film thickness and the defect density on solar cells are summarized. As well it is compared the performance of solar cells with Zn1-xMgxO buffer layer with those applying other buffer layer materials.