Abstract:The phase difference was utilized to detect the position of the incident light on the surface of position sensitive detector (PSD). The photocurrents, phase and difference phase were derived from the RC equivalent transmission model of 1D PSD. For different modulation frequencies, the relations of phase and phase difference with the position x were analyzed. The experimental results show that the linearity is obvious and the sensitivity is raised as the modulation frequency increases, which are consistent with the theoretical result.