硅基波导用楔形模斑变换器的研究进展

Research Progresses of Spot-size Converter Used for Silicon Photonic Devices

摘要:

楔形模斑变换器在利用硅基光子集成技术实现芯片间光互连中有着广泛的应用。文章概述了国内外楔形模斑变换器的最新研究进展。介绍了几种新型模斑变换器的结构及制作的工艺流程，并对其性能及影响楔形模斑变换器耦合效率的几个因素进行了分析比较，进而讨论了这几种模斑变换器存在的问题及进一步提高耦合效率的可能性。

Abstract:

Tapered silicon spot-size converters are widely used for coupling light between fibers and silicon waveguides in silicon-based optical interconnection. In this paper, the latest progresses of tapered spot-size converter are reviewed, and several kinds of novel spot-size converter are introduced from the aspects of structure, performance and fabrication process. Several factors affecting the coupling efficiency are analyzed, as well as the possibilities for further improvement on the coupling efficiency are discussed.