Abstract:Various factors which affect the consistency of the output characteristics of PIN four-quadrant detectors are discussed, and the corresponding methods are proposed. With simulation analysis, the design parameters are optimized, and the detectors working at 1060nm wavelength under 50V bias are fabricated.The response of 0.3A/W and dark current less than 50nA are obtained for each quadrant of the PIN detectors. The output difference of the four quadrants is less than 10% for the detector chip. Then by making installation and debugging of the amplifying circuit for each quadrant, the four-quadrant detectors with the output difference less than 3% are fabricated.