Multi-crystalline silicon surface texturing is a generally used technology in mc-Si solar cells production. However Si surfaces textured in traditional HF/HNO3/H2O solution are always filled with long deep ditches which will decrease the Conversion efficiency by increasing leakage current. In this paper, the ratio of HF and HNO3 is adjusted to avoid the appearance of the ditches at the cost of reducing antireflection effect, then a kind of anionic surfactant applied into solution to improve surface topography. The experimental results show that the final textured surfaces can achieve low reflection without long deep ditches, which is very ideal for mc-Si solar cells.
