Ka波段五位分布式MEMS传输线移相器设计

Design of Ka-band Five-bit Distributed MEMS Transmission Line Phase Shifter

摘要:

通过在共面波导上周期性地加载分布电容,外加驱动电压改变电容值,实现分布式MEMS移相器。首先给出了5位分布式MEMS移相器的总体结构图,分析了理论参数的设计方法。再采用HFSS建立单个微桥的三维电磁仿真模型,利用仿真得到的S参数拟合微桥的up态和down态电容值并与理论设计电容值对比,确定MEMS桥精确的结构参数。最后采用ADS建立分布式MEMS移相器整体的微波等效电路,仿真得出移相器的性能指标参数。仿真结果表明移相器在35GHz时移相精度小于0.6°,移相器的插入损耗小于0.3dB,回波损耗大于25dB。

Abstract:

The distributed MEMS phase shifters are achieved by periodically loading distributed capacitors on a coplanar waveguid.The capacitance of the MEMS capacitors is contolled by the driving voltage.The overall structure of the 5-bit distributed MEMS phase shifter is presented,and the design methods of theoretical parameters are analyzed.Software HFSS is applied to built and simulate the three-dimensional model of single MEMS bridge section,and simulation results of the S paraments are used to determine the prec...