薄膜与微细技术教育部重点实验室微米/纳米加工技术国家级重点实验室上海交通大学微纳科学技术研究院;
TM914.4
上海市科委科技基金资助项目(0952nm06400); 欧盟第七科技框架计划项目(241277-2); 国家“973”计划项目(2010CB933702)
CHEN Jian,WANG Qingkang,LI Haihua(National Key Laboratory of Micro/Nano Fabrication Technology,Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiaotong University,Shanghai 200240,CHN)